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AlN granule

ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.

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Product characteristics

High Purity

1

Ready for press

2

High strength

3

High sintering activity

4

High fluidity

5

技術參數

項目Item

GS-80

GS-B

KS-80

平均粒徑Mean particle size (μm)

70~120

70~120

60~100

顆粒形狀Particle shape

球形

球形

球形

流動性Fluidity(s/50g)

<90

<90

<90

Y?O? (wt%)

~5

<0.1

~5

雜質含量Impurity

Ca (ppm)

<300

<300

<300

Si (ppm)

<100

<100

<200

Fe (ppm)

<30

<30

<100

松裝密度Bulk density（g/cm3)

1.0~1.2

1.0~1.2

1.0~1.2

振實密度Tap density（g/cm3)

1.0~1.3

1.0~1.3

1.0~1.3

生坯密度Green density (g/cm3)

2.05~2.10

2.0~2.05

2.05~2.10

成形工藝



脫脂工藝


200℃前3℃/ min ，400℃前2℃/ min，500℃前5℃/ min ，保溫2小時。

燒結溫度1830~1900℃，保溫時間3~5 hrs,流動氮氣，0.1MPa

產品應用

壓制陶瓷原料：加熱器/靜電吸盤/刻蝕防護罩/熱壓氮化鋁陶瓷


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